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pro vyhledávání: '"Michitaka Takasaki"'
Autor:
Shinichi Ishibashi, Michitaka Takasaki, Migaku Takahashi, Masanobu Onodera, Yoshito Ashizawa, Shin Saito
Publikováno v:
Journal of the Vacuum Society of Japan. 53:521-526
Concept of ultra clean (UC) dry-process proposed by present authors in 1990s has been widely used in various thin film fabrication fields from the view point of research as well as volume production stages of electronic devices. Original basic concep
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d9276312cfb771a3c8848d792d02369b
https://doi.org/10.3131/jvsj2.53.521
https://doi.org/10.3131/jvsj2.53.521
