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pro vyhledávání: '"Michiel Victor Paul Kruger"'
Autor:
Michiel Victor Paul Kruger, Vishnu Kamat, Marc D. Himel, Bayram Yenikaya, Jared D. Stack, Apo Sezginer, Tamer H. Coskun, James Carriere
Publikováno v:
SPIE Proceedings.
We present a method for optimizing a free-form illuminator implemented using a diffractive optical element (DOE). The method, which co-optimizes the source and mask taking entire images of circuit clips into account, improves the common process-windo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::46dc8493ff71f39930ce9b2e6449b2fc
https://doi.org/10.1117/12.814215
https://doi.org/10.1117/12.814215
