Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Michiel Blauw"'
Publikováno v:
Sensor Letters. 12:1526-1529
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1361d9ec01a4b5b4b4338d74aa4ae2ed
https://doi.org/10.1166/sl.2014.3345
https://doi.org/10.1166/sl.2014.3345
Autor:
Mikhail R. Baklanov, Patrick Verdonck, Mikhail Krishtab, Silvia Armini, Michiel Blauw, Herbert Struyf, Thierry Conard, Jana Loyo Prado, Johan Swerts, Johan Meersschaut
Publikováno v:
Microelectronic Engineering. 120:240-245
Self-assembled monolayers (SAMs) derived from 11-cyanoundecyltrichlorosilane precursor are deposited in vapor phase and characterized on ultra-low- k Chemical Vapor Deposition (CVD) dielectric films ( k = 2.0) with open porosity up to 50% and pore di
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ec7a776adf55a77f4ccde742a3968c3
https://doi.org/10.1016/j.mee.2013.08.007
https://doi.org/10.1016/j.mee.2013.08.007
Autor:
Devrez Mehmet Karabacak, Michiel Blauw, Zeng Zeng, Mercedes Crego Calama, Rob van Schaijk, Van Anh T. Dam, Roman Vitushinsky, R. J. M. Vullers, Sywert Brongersma, Marcel A. G. Zevenbergen
Publikováno v:
physica status solidi c. 11:46-49
Western societies all see their healthcare costs outpace GDP growth. To reverse this trend, several public and private initiatives were taken in the last years to make healthcare more cost efficient. It is anticipated that micro and nano-system techn
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cbb4143b8a1018f5a567d202781ba877
https://doi.org/10.1002/pssc.201300182
https://doi.org/10.1002/pssc.201300182
Publikováno v:
ECS Transactions. 50:137-140
Accurate control over film thickness and morphology, as can be obtained by atomic layer deposition, provides an effective means to reduce the operating temperature of metal oxide based gas sensors. Room temperature operation has been achieved with a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::17c97a02b051424112c19f69a1aae92a
https://doi.org/10.1149/05013.0137ecst
https://doi.org/10.1149/05013.0137ecst
Autor:
J. Loyo Prado, Michiel Blauw, Johan Meersschaut, Patrick Verdonck, Silvia Armini, M. R. Baklanov, Mikhail Krishtab, Yiting Sun, J. Swerts
Publikováno v:
ECS Solid State Letters. 1:P42-P44
Due to its excellent step coverage characteristics, atomic layer depositions (ALD) deposit their material not only on top of underlying surfaces but also into the pores of porous low-k films. In this study, the film characteristics caused by pre-trea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::82ed924111c9b5d423e20bea35bb99fb
https://doi.org/10.1149/2.012202ssl
https://doi.org/10.1149/2.012202ssl
Autor:
Mikhail R. Baklanov, Christophe Detavernier, Steven De Feyter, Elisabeth Levrau, Johan Meersschaut, Herbert Struyf, Silvia Armini, Yiting Sun, Patrick Verdonck, Michiel Blauw
Publikováno v:
MRS Proceedings. 1559
In this work, a novel low dielectric constant (low-k) pore sealing approach was engineered by depositing firstly a sub-2 nm SAMs and then a 3 nm TiN barrier film. The low-k film was pretreated by plasma to introduce hydroxyl groups onto the surface,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::739885a9f39ac4fe528e20e5d7d00693
https://doi.org/10.1557/opl.2013.716
https://doi.org/10.1557/opl.2013.716
Autor:
J. Musschoot, Mercedes Crego-Calama, Michiel Blauw, Christophe Detavernier, Sywert Brongersma, V.A.T. Dam
Publikováno v:
2011 IEEE SENSORS Proceedings.
ZnO thin films for O 2 sensing were obtained with atomic layer deposition (ALD) and treated with rapid thermal annealing (RTA). The response of the ZnO conductivity to O 2 exposure is reversible at 270 °C. The sensitivity and responsivity are increa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3f740d0165a86c15c0ff61f8e8d646ed
https://doi.org/10.1109/icsens.2011.6127128
https://doi.org/10.1109/icsens.2011.6127128
Publikováno v:
ECS Meeting Abstracts. :1882-1882
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e8f3cb469b58918c97a21c940a6af6e1
https://doi.org/10.1149/ma2013-02/24/1882
https://doi.org/10.1149/ma2013-02/24/1882