Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Micher, Johann"'
Autor:
Schweizer, Peter, Sturm, Patrick, Brozi, Aurelio, Thomet, Jonathan, Micher, Johann, Hessler-Wyser, Aicha, Nelis, Thomas
This work focuses on the low temperature fabrication process of InN thin films via microwave plasma-assisted reactive high power impulse magnetron sputtering (MAR-HiPIMS). The influence of microwave plasma on the HiPIMS discharge process at various n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e803b770ee2d9ef095167526cfcd682d