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pro vyhledávání: '"Michel Tabusse"'
Autor:
Dominique Sadran, Michel Tabusse, Philippe Morey-Chaisemartin, Isabelle Servin, David Au, Stéphane Bonniol, Michel Tissier, Patrick Garcia, Eric Beisser
Publikováno v:
SPIE Proceedings.
The cost of production of a photomask set has been soaring over the last few years, and now reaches $1 million to $2 million, almost 10% of the overall cost of a new project development. And new projects have seen their profitability lifetime reduced
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f525e4ec07ad63e6109e3c98152b95af
https://doi.org/10.1117/12.824273
https://doi.org/10.1117/12.824273
