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pro vyhledávání: '"Michel Eberlein"'
Diffraction from Periodic Arrays of Oxide-Filled Trenches in Silicon: Investigation of Local Strains
Publikováno v:
MRS Proceedings. 913
The experimental evaluation of stresses at the nanometer scale is a real challenge. We propose an innovative use of High Resolution X-Ray Diffraction to measure local strains induced in silicon by periodic arrays. This technique is non-destructive an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4db0821d32fbc38114848626ae8ba87a
https://doi.org/10.1557/proc-0913-d05-02
https://doi.org/10.1557/proc-0913-d05-02
