Zobrazeno 1 - 1
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pro vyhledávání: '"Michail D. Bal'makov"'
Publikováno v:
SPIE Proceedings.
Microelectronics industry is growing fast and the rate of new devices’ development increases every year. Therefore, methods for simple and high-precision metal coating on dielectrics are needed. Existing methods do not allow performing the high-pre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::47bfcb633ad10ea6da7d4ee2e52a1c1d
https://doi.org/10.1117/12.2182080
https://doi.org/10.1117/12.2182080
