Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Michael W. Putty"'
Autor:
G Woodward, Michael W. Putty, R Weston, S Zarabadi, Douglas Ray Sparks, K Jayakar, L Jordan, G Queen
Publikováno v:
Journal of Micromechanics and Microengineering. 11:630-634
The fabrication and reliability of a solder wafer-to-wafer bonding process is discussed. Using a solder reflow process allows vacuum packaging to be accomplished with unplanarized complementary metal-oxide semiconductor (CMOS) surface topography. Thi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fb8d9250e536a9be550d42c7644e0535
https://doi.org/10.1088/0960-1317/11/6/303
https://doi.org/10.1088/0960-1317/11/6/303
Autor:
Seyed R. Zarabadi, W. Higdon, M. Chia, P. Castillo-Borelley, Douglas R. Sparks, L. Obedier, Michael W. Putty, Q. Jiang, Shih-Chia Chang, Q. Shi, Jack D. Johnson
Publikováno v:
Sensors and Actuators A: Physical. 66:138-143
A CMOS integrated, surface-micromachined angular rate sensor utilizing an electroformed vibrating metal ring structure on a silicon IC has been developed. Substantial signal-conditioning circuitry is included on the IC with the vibrating structure. T
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8ec9aaac1bfa387b484354ec857d8bef
https://doi.org/10.1016/s0924-4247(97)01761-5
https://doi.org/10.1016/s0924-4247(97)01761-5
Publikováno v:
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
Polyimide, polymethylmethacrylate (PMMA) and polyester-based polymers were investigated as potential electroplating mold materials. They showed high tensile stress (/spl equiv/10/sup 8/ dyne/cm/sup 2/) after heat treatment at temperatures /spl ges/ 2
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8fcfe829f68a1c58220c47d3accc057d
https://doi.org/10.1109/sensor.1995.717290
https://doi.org/10.1109/sensor.1995.717290
Autor:
Shih-Chia Chang, Michael W. Putty
Publikováno v:
MEMS/MOEMS Components and Their Applications II.
Four different approaches for the construction of a single crystal silicon vibratory ring gyroscope were investigated. All of them require deep trench etching (DRIE)of silicon, anodic bonding of silicon structures to a glass wafer, and a dissolve sil
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7916a42822b267b01b599e7a7c4bb00a
https://doi.org/10.1117/12.583593
https://doi.org/10.1117/12.583593
Publikováno v:
IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.
Theoretical and experimental characteristics of a two-terminal, or one-port, resonant microstructure are discussed. An equivalent circuit model that is useful for design and analysis of these devices is presented. This model is verified by experiment
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4600b33fee22a29bde4d2361fd3a6355
https://doi.org/10.1109/memsys.1989.77962
https://doi.org/10.1109/memsys.1989.77962
Autor:
Shih-Chia Chang, Michael W. Putty
Publikováno v:
SPIE Proceedings.
High aspect ratio single crystal silicon resonant beams oriented with angles of 0, 11.25, 22.5, 33.75, and 45 degrees to the Si 100 direction were fabricated by using high density plasma etching and dissolved wafer techniques. The silicon was doped w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4f42ef24b558ce6609b64bef9a91abeb
https://doi.org/10.1117/12.361222
https://doi.org/10.1117/12.361222
Publikováno v:
SPIE Proceedings.
Electroformed nickel resonators were constructed and tested in the temperature range of - 40 to 110 degrees C. The temperature sensitivities of the resonant frequencies are - 150 ppm/degrees C, - 200 ppm/degrees C, and - 3000 ppm/degrees C for cantil
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0605aa214588d681bc8fb63eb94045d8
https://doi.org/10.1117/12.221293
https://doi.org/10.1117/12.221293
Autor:
Michael W. Putty, Khalil Najafi
Publikováno v:
1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ff5ec941da33195c475d675507a12632
https://doi.org/10.31438/trf.hh1994.49
https://doi.org/10.31438/trf.hh1994.49
Publikováno v:
1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::860286338783a51f0e860cf549c869b8
https://doi.org/10.31438/trf.hh1994.19
https://doi.org/10.31438/trf.hh1994.19
Publikováno v:
Sensors and Actuators. 20:143-151
Microsensors based on active polysilicon resonant microstructures are attractive because of their wide dynamic range, high sensitivity and frequency shift output. In this paper, we discuss processing issues for integrating electrostatically-driven an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f0d2189f726d4c778e8da9f2e5ae9dc7
https://doi.org/10.1016/0250-6874(89)87112-4
https://doi.org/10.1016/0250-6874(89)87112-4