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pro vyhledávání: '"Michael Sevegney"'
Autor:
Nick Brakensiek, Michael Sevegney
Publikováno v:
SPIE Proceedings.
Photofluid dispense systems within coater/developer tools have been designed with the intent to minimize cost of ownership to the end user. Waste and defect minimization, dispense quality and repeatability, and ease of use are all desired characteris
Autor:
Makoto Momota, Takashi Nakamura, Shuichi Tsuzuki, Toru Numaguchi, Toru Umeda, Shinichi Sugiyama, Michael Sevegney
Publikováno v:
SPIE Proceedings.
An effective filter start-up method has been required by device manufacturers, mainly in order to reduce waste volume of lithography process chemicals, which become more expensive as lithography technology advances. Remaining air was monitored during
Autor:
Michael Mesawich, Barry Gotlinsky, Santos Reyes, Mario A. Rivera, Jeremy Marzani, Michael Sevegney, Patrick Abbott
Publikováno v:
Advances in Resist Materials and Processing Technology XXVI.
Reduced tolerance for defectivity is a well-documented consequence of the semiconductor industry's constant progress toward smaller IC device dimensions. Among all manufacturing functional areas, photolithography is arguably the most sensitive to pro