Zobrazeno 1 - 10
of 33
pro vyhledávání: '"Michael S. Yeung"'
Autor:
Michael S. Yeung
Publikováno v:
Microwave and Optical Technology Letters. 32:383-388
A single integral-equation formulation based on multilayered media Green's functions is presented and applied to 2-D dielectric grating problems. Its advantage over previous formulations based on free-space Green's functions is that, here, the unknow
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6d0d806dbae28c1fa7f17698c11c4eab
https://doi.org/10.1002/mop.10185
https://doi.org/10.1002/mop.10185
Publikováno v:
SPIE Proceedings.
To protect an EUV mask from contamination, a pellicle can be used. However, the pellicle membrane must be very thin due to EUV absorption. As a result, a pellicle support structure is needed to avoid deflection of the membrane by gravity. Previous au
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e833742b65bfc26c02800c208a6ae478
https://doi.org/10.1117/12.2045618
https://doi.org/10.1117/12.2045618
Autor:
Michael S. Yeung
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 13:24-33
A new method of measurement of wave-front aberrations in high-resolution optical lithographic systems used for semiconductor manufacturing is proposed. The method is based on the measurement of the positional shifts and focus offsets of a set of prin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7d823c594753712bb4d8b55bb13199ab
https://doi.org/10.1109/66.827337
https://doi.org/10.1109/66.827337
Autor:
Michael S. Yeung
Publikováno v:
Journal of Scientific Computing. 15:1-17
The problem of electromagnetic scattering by a homogeneous dielectric object is usually formulated as a pair of coupled integral equations involving two unknown currents on the surface S of the object. In this paper, however, the problem is formulate
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f4762fdb7355d1936e17536d6611e117
https://doi.org/10.1023/a:1007575417396
https://doi.org/10.1023/a:1007575417396
Autor:
Michael S. Yeung
Publikováno v:
Microwave and Optical Technology Letters. 23:238-242
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::526c30236b8510c6b63105aaa7d2c499
https://doi.org/10.1002/(sici)1098-2760(19991120)23:4<238::aid-mop15>3.0.co
https://doi.org/10.1002/(sici)1098-2760(19991120)23:4<238::aid-mop15>3.0.co
Autor:
Michael S. Yeung
Publikováno v:
Journal of Scientific Computing. 14:121-145
An incident wave source for finite-difference time-domain (FDTD) computation of electromagnetic scattering involving layered dispersive media is described. The method is based on the decomposition of an arbitrary incident wave into its frequency comp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a284443d1fb00bebcebff97fc557cf06
https://doi.org/10.1023/a:1023278902960
https://doi.org/10.1023/a:1023278902960
Autor:
Michael S. Yeung
Publikováno v:
IEEE Transactions on Antennas and Propagation. 47:1615-1622
A single integral equation formulation for electromagnetic scattering by three-dimensional (3-D) homogeneous dielectric objects is developed. In this formulation, a single effective electric current on the surface S of a dielectric object is used to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9da864554de40377ed668d91cf70f832
https://doi.org/10.1109/8.805907
https://doi.org/10.1109/8.805907
Autor:
T. K. Gustafson, Michael S. Yeung
Publikováno v:
Physical Review A. 54:5227-5242
The lifetime of an excited atom near an absorbing dielectric surface is calculated from an exact solution of a microscopic Hamiltonian model, which includes the effects of dispersion, local-field correction, and near-field Coulomb interaction. Result
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8422e80e8fe715039d0f707600344254
https://doi.org/10.1103/physreva.54.5227
https://doi.org/10.1103/physreva.54.5227
Autor:
Michael S. Yeung
Publikováno v:
SPIE Proceedings.
The FDTD method has difficulty in modeling buried defects in multilayered EUV masks because of the limitations of grid snapping, large numerical-dispersion errors and rectangular cells that do not fit the non-planar shapes of buried defects easily. I
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5568928a7dabae2790c4362ef666c00f
https://doi.org/10.1117/12.916471
https://doi.org/10.1117/12.916471
Autor:
Michael S. Yeung
Publikováno v:
Photomask Technology 2008.
Subgrid and subcell FDTD (S-FDTD) methods are described. They can be used for the fast and accurate simulation of mask electromagnetic effects in sub-45nm lithography. The accuracies of the S-FDTD methods are verified by comparison with FDTD and with
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::13159f252b2c73f2ef32538750ff734d
https://doi.org/10.1117/12.801351
https://doi.org/10.1117/12.801351