Zobrazeno 1 - 1
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pro vyhledávání: '"Michael S. Lacy"'
Autor:
John Francis Valley, Noel Poduje, Chris Koliopoulus, Winthrop A. Baylies, Hong Jiang Sun, Pat Hester, Duane S. Boning, Dale L. Hetherington, Michael S. Lacy, Brian Lee, Yong Xia
Publikováno v:
MRS Proceedings. 671
Nanotopography refers to 10-100 nm surface height variations that exist on a lateral millimeter length scale on unpatterned silicon wafers. Chemical mechanical polishing (CMP) of deposited or grown films (e.g., oxide or nitride) on such wafers can ge
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96e340b628f06d1740a49eda84fb2e98
https://doi.org/10.1557/proc-671-m4.9
https://doi.org/10.1557/proc-671-m4.9
