Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Michael Phillip Newell"'
Publikováno v:
SPIE Proceedings.
The lack of measured surface scatter data at extreme ultraviolet (EUV) wavelengths has been commented upon by a number of authors. The need for such data arises primarily in the area of stray light design and analysis. Most stray light software requi
Publikováno v:
SPIE Proceedings.
The BRDF of a MgF2 protected Al mirror contaminated with dust particulates due to exposure to the laboratory environment has been measured and is presented for wavelengthsof 633nm, 325nm, 121.6nm and 74.Onm. This experimental data is compared with th
Publikováno v:
Applied Optics. 36:5471
Bidirectional reflectance distribution function (BRDF) measurements of a number of diffuse extreme ultraviolet (EUV) scatterers and EUV baffle materials have been performed with the Goddard EUV scatterometer. BRDF data are presented for white Spectra
Publikováno v:
Applied Optics. 36:2897
A scatterometer capable of plane-of-incidence bidirectional reflectance distribution function (BRDF) measurements at extreme ultraviolet wavelengths between 58.4 and 121.6 nm has been developed. This instrument has a lower measurement limit of approx