Výsledky vyhledávání - "Michael Gros-Jean"

Quantitative depth profiling of ultrathin high-k stacks with full spectrum time of flight–secondary ion mass spectrometry

Autor: Kenji Kimura, Rachid Boujamaa, Matthieu Py, Narciso Gambacorti, Charbel Roukoss, Kaoru Nakajima, Michael Gros-Jean, Bernard Pelissier, Jean-Paul Barnes

Publikováno v: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 29:032208

Elemental concentration depth profiles of high-k material stacks for 32 nm node devices and below were acquired by high resolution backscattering spectrometry (HRBS), parallel angle resolved-x-ray photoelectron spectroscopy (pAR-XPS), and time of fli

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c1d727de808d1cc193638a79a152b573
https://doi.org/10.1116/1.3589806

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