Zobrazeno 1 - 10
of 18
pro vyhledávání: '"Michael F. Lofaro"'
Autor:
Chao Wang, Sung-Wook Nam, John M. Cotte, Christopher V. Jahnes, Evan G. Colgan, Robert L. Bruce, Markus Brink, Michael F. Lofaro, Jyotica V. Patel, Lynne M. Gignac, Eric A. Joseph, Satyavolu Papa Rao, Gustavo Stolovitzky, Stanislav Polonsky, Qinghuang Lin
Publikováno v:
Nature Communications, Vol 8, Iss 1, Pp 1-9 (2017)
The wide use of microfluidics for biological analysis demands scalable preparation methods, yet in practice it is very challenging. Here, Wanget al. show a wafer-scale fabrication of nanofluidic chips with single-digit nanometre dimension, which is c
Externí odkaz:
https://doaj.org/article/8dfe6382a6f3435d9401956b405c4b22
Autor:
Martin M. Frank, Robert L. Bruce, Effendi Leobandung, Christian Lavoie, Michael F. Lofaro, John Bruley, Heinz Schmid, Cheng-Wei Cheng, Pouya Hashemi, John A. Ott, Christopher P. D'Emic, R. Mo, William T. Spratt, Guy M. Cohen, Sungjae Lee, Vijay Narayanan, Lukas Czornomaz, J. Patel, T. Ando, Xiao Sun, Hiroyuki Miyazoe
Publikováno v:
2018 IEEE International Electron Devices Meeting (IEDM).
We report InGaAs gate-all-around nanosheet NFETs on Si substrate using template-assisted-selective-epitaxy (TASE) and a gate-last process with thermal budget advantages. Compared to our early report of the TASE process, in this paper we demonstrate t
Autor:
Joshua T. Smith, Kamlesh K Yadav, Carlos Cordon-Cardo, Ashutosh K. Tewari, Mehmet Eren Ahsen, Michael F. Lofaro, Kayla Lee, Mantu Gupta, John M. Papalia, Michael A. Pereira, Navneet Dogra, Gustavo Stolovitzky, Benjamin H. Wunsch, J. Patel, Elizabeth A. Duch, Stacey M. Gifford, Rachel Weil
Publikováno v:
Lab on a chip. 18(24)
Extracellular vesicles (EVs) offer many opportunities in early-stage disease diagnosis, treatment monitoring, and precision therapy owing to their high abundance in bodily fluids, accessibility from liquid biopsy, and presence of nucleic acid and pro
Autor:
Michael F. Lofaro, Anthony J. Annunziata, Daniel C. Edelstein, Michael C. Gaidis, Dirk Pfeiffer, Adam M. Pyzna, Eugene J. O'Sullivan, Nathan P. Marchack, Eric A. Joseph, Yu Zhu, Armand Galan, P. L. Trouilloud, Jemima Gonsalves, S. Holmes
Publikováno v:
ECS Transactions. 69:127-137
Recent developments in new switching methods, such as spin transfer torque and temperature-assisted switching (TAS), have greatly increased interest in MRAM. However, MRAM fabrication is challenging due to the lack of magnetic materials processing ex
Autor:
Effendi Leobandung, Lee Choonghyun, John Bruley, Siyuranga O. Koswatta, Sebastian Engelmann, John A. Ott, K.K. Chan, Vijay Narayanan, Michael F. Lofaro, Eduard A. Cartier, Takashi Ando, R. Mo, Pouya Hashemi, Simon Dawes, K.-L. Lee
Publikováno v:
2017 Symposium on VLSI Technology.
We demonstrate scaled high-Ge-content (HGC) strained SiGe pMOS FinFETs with very high short channel (SC) performance using a Replacement High-K/Metal Gate (RMG) flow, for the first time. A novel RMG gate stack process was introduced to create Ge-free
Autor:
Lynne Gignac, D.-G. Park, Christian Lavoie, Robert L. Bruce, Hiroyuki Miyazoe, Kenneth P. Rodbell, D. Klaus, C. M. Breslin, Michael F. Lofaro, Markus Brink, Hsinyu Tsai, A. Pyzyna, M. Guillorn, Eric A. Joseph
Publikováno v:
2017 IEEE International Interconnect Technology Conference (IITC).
The resistivity of damascene Cu is measured at cross-sectional area as low as 95 nm2. The impact of aspect ratio and line edge roughness on resistivity is investigated. Kelvin resistance test structures are demonstrated with 28 nm pitch wires pattern
Autor:
Christopher V. Jahnes, Markus Brink, Robert L. Bruce, Lynne Gignac, J. Patel, John M. Cotte, Qinghuang Lin, Eric A. Joseph, Satyavolu S. Papa Rao, Sung-Wook Nam, Michael F. Lofaro, Stanislav Polonsky, Gustavo Stolovitzky, Chao Wang, Evan G. Colgan
Publikováno v:
Nature Communications
Nature Communications, Vol 8, Iss 1, Pp 1-9 (2017)
Nature Communications, Vol 8, Iss 1, Pp 1-9 (2017)
Wafer-scale fabrication of complex nanofluidic systems with integrated electronics is essential to realizing ubiquitous, compact, reliable, high-sensitivity and low-cost biomolecular sensors. Here we report a scalable fabrication strategy capable of
Autor:
Christopher J. Waskiewicz, Raghuveer R. Patlolla, Kunaljeet Tanwar, Wei-Tsu Tseng, Christopher J. Penny, Michael F. Lofaro, Donald F. Canaperi
Publikováno v:
Journal of The Electrochemical Society. 160:D3247-D3254
Autor:
John Rozen, K.K. Chan, Effendi Leobandung, A. Pyzyna, Michael F. Lofaro, Karthik Balakrishnan, Simon Dawes, Sebastian Engelmann, R. Mo, Siyuranga O. Koswatta, Eduard A. Cartier, Vijay Narayanan, Takashi Ando, Pouya Hashemi, D.-G. Park, John Bruley, John A. Ott, K.-L. Lee
Publikováno v:
2016 IEEE Symposium on VLSI Technology.
High-Ge-content (HGC) SiGe FinFETs in a “replacement High-K and metal-gate” (RMG) process flow and with aggressive EOT scaling are demonstrated, for the first time. HGC SiGe pMOS FinFETs with high-mobility, record-low RMG long-channel SS=66mV/dec
Autor:
M. Guillorn, Kenneth P. Rodbell, Christian Lavoie, A. Pyzyna, Hiroyuki Miyazoe, Eric A. Joseph, Hsinyu Tsai, D. Klaus, C. Witt, Markus Brink, Robert L. Bruce, Lynne Gignac, D.-G. Park, Michael F. Lofaro, Gregory M. Fritz
Publikováno v:
2015 Symposium on VLSI Technology (VLSI Technology).
The resistivity of damascene copper is measured at pitch ranging down to 40 nm and copper cross-sectional area as low as 140 nm2. Metallization by copper reflow is demonstrated at 28 nm pitch with patterning by directed self-assembly (DSA). Extremely