Zobrazeno 1 - 1
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pro vyhledávání: '"Michael Dr Ing Mettner"'
Autor:
H.-P. Trah, C. Doring, H. Baumann, H. Goebel, Michael Dr Ing Mettner, Thomas Dipl Phys Dr Grauer
Publikováno v:
Sensors and Actuators A: Physical. 39:169-176
We report on the design, fabrication and performance of a micromachined valve for hydraulic applications. The valve is composed of a stack of four silicon wafers and utilizes a new actuation principle, which to our knowledge is presented for the firs
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::263c77ceeb41ac56b09d033c31536d26
https://doi.org/10.1016/0924-4247(93)80214-2
https://doi.org/10.1016/0924-4247(93)80214-2
