Zobrazeno 1 - 10
of 22
pro vyhledávání: '"Michał Krysztof"'
Autor:
Michał Krysztof
Publikováno v:
Microsystems & Nanoengineering, Vol 7, Iss 1, Pp 1-9 (2021)
Abstract This article presents a field-emission electron gun intended for use in a MEMS (microelectromechanical system) electron microscope. Its fabrication process follows the technology of a miniature device under development built from silicon ele
Externí odkaz:
https://doaj.org/article/0962ccecaefc45e5a05e453bee89614a
Akademický článek
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Autor:
Michał Krysztof
Publikováno v:
Electronics
Volume 10
Issue 19
Electronics, Vol 10, Iss 2338, p 2338 (2021)
Volume 10
Issue 19
Electronics, Vol 10, Iss 2338, p 2338 (2021)
In this paper, the results of modeling and simulation of a microcolumn are presented. The microcolumn is part of a developed miniature MEMS electron microscope equipped with a miniature MEMS high-vacuum micropump. Such an arrangement makes this devic
Publikováno v:
Ultramicroscopy. 225
This article describes a miniature electron beam scanning system based on an octupole electrode as the key stage of the implementation of the MEMS electron microscope. The scanning system consists of a silicon electrode with a central hole, containin
Publikováno v:
Micron. 104:45-60
The paper considers some major problems of adapting the multi-detector method for three-dimensional (3D) imaging of wet bio-medical samples in Variable Pressure/Environmental Scanning Electron Microscope (VP/ESEM). The described method pertains to
Autor:
Karolina Laszczyk, Michał Krysztof
Publikováno v:
Vacuum. 189:110236
A tiny and light-weight miniaturized electron microscope would enable the research in the so-far inaccessible areas and harsh environments, including interplanetary exploration. There were already reported few designs of miniaturized electron microsc
Publikováno v:
2018 31st International Vacuum Nanoelectronics Conference (IVNC).
This paper describes a miniature, silicon-glass, electron-impact ion source, in which a field emission carbon nanotube cathode is separated from the external atmosphere by a semitransparent Si3N4 membrane. High vacuum necessary for the proper operati
Publikováno v:
2018 31st International Vacuum Nanoelectronics Conference (IVNC).
We present the planar cathode that is dedicated for the miniaturized transmission electron microscope, which all components are fabricated based on MEMS Si-glass technology processes. The cathode is made of a commercial CNT ink without addition of fi
Publikováno v:
2018 31st International Vacuum Nanoelectronics Conference (IVNC).
A preliminary imaging concept in a miniature MEMS electron microscope is presented. The setup of the measurements is described and the mechanism of the imaging process is explained. Authors present also results of simulations and measurements concern
Autor:
Michał Krysztof, Tomasz Grzebyk, Karolina Laszczyk, Piotr Szyszka, Jan Dziuban, Anna Gorccka-Drzazza
Publikováno v:
2018 XV International Scientific Conference on Optoelectronic and Electronic Sensors (COE).
This article describes one of the element of the miniature MEMS transmission electron microscope fully integrated on one chip, which is being developed at Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology.