Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

Autor: Cyril Baby Karuthedath, Mervi Paulasto-Kruckel, Abhilash Sebastian Thanniyil, Kristina Bespalova, Tuomas Pensala, Stefan Mertin, Glenn Ross

Publikováno v: 2020 IEEE International Ultrasonics Symposium (IUS)
Bespalova, K, Ross, G, Paulasto-Kröckel, M, Abhilash, T S, Karuthedath, C, Mertin, S & Pensala, T 2020, Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration . in 2020 IEEE International Ultrasonics Symposium (IUS) . IEEE Institute of Electrical and Electronic Engineers, IEEE International Ultrasonics Symposium, IEEE International Ultrasonics Symposium, IUS, Las Vegas, Nevada, United States, 7/09/20 . https://doi.org/10.1109/IUS46767.2020.9251496

openaire: EC/H2020/783132/EU//POSITION-II In this study, Al0.8Sc0.2N multilayer structures phase stability, interfacial quality, and piezoelectric response were tested before and after annealing in wide range of temperatures and times. The thicknesse

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d9c8c0a73cc8f4975d35d261d9cc3aa3
https://doi.org/10.1109/ius46767.2020.9251496