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pro vyhledávání: '"Merritt Phillips"'
Autor:
Yew-Kong Tan, Gin Ping Sun, D. Arunagiri Rajan, K. J. Prasad, Stephen P. Morgan, Merritt Phillips, Bruce Ng
Publikováno v:
SPIE Proceedings.
This paper demonstrates the overlay capability of ASML's ATHENA alignment system on I-line steppers for W-CMP processes. The evaluation presents the method used to find the best scribe-line marks, alignment recipe and the long term overlay capability
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c499d06fa676e56745a6c208ce3910ad
https://doi.org/10.1117/12.436730
https://doi.org/10.1117/12.436730
Autor:
Johannes Plauth, Allan Dunbar, Giovanni Rivera, Guido Miraglia, Merritt Phillips, Pui Leng Lam, Elisabetta Castellana, Laura Rozzoni
Publikováno v:
SPIE Proceedings.
ATHENA is the new alignment system designed to minimize the alignment offset due to mark-deformation as induced by a WCMP process. We report the results of its evaluation at STMicroelectronics for a 0.25 μm-device which employs six metal-interconnec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bdcee1cbe6b3b43a880ce4112ba437a8
https://doi.org/10.1117/12.386498
https://doi.org/10.1117/12.386498
Conference
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