Zobrazeno 1 - 10
of 65
pro vyhledávání: '"Merle E. Riley"'
Autor:
Merle E Riley, Kevin E Riley
Publikováno v:
European Journal of Physics. 42:065406
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 20:1759-1768
In this article, we present ion energy distributions (IEDs) at a rf-biased surface as a function of driving frequency and ion mass. The experiments were carried out in high-density inductively coupled rare-gas (Ne,Ar,Xe) plasmas. Our quadrupole mass
Autor:
C. G. Willison, T. W. Hamilton, I. C. Abraham, B. P. Aragon, Paul A. Miller, Randy J. Shul, J. R. Woodworth, Merle E. Riley
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 20:873-886
We report the measurement of ion energy distributions at a radio frequency (rf)-biased electrode in inductively driven discharges in argon. We compare measurements made with a gridded energy analyzer and a commercial analyzer that contains a mass spe
Autor:
Burke Ritchie, Merle E. Riley
Publikováno v:
International Journal of Quantum Chemistry. 90:792-798
Two methods are studied for elastic electron–atom and electron–molecule elastic scattering. The first is a numerical solution of the time-dependent Schrodinger equation suitable for continuum states; the second is a convergent modified Born serie
Autor:
Merle E. Riley, A. Burke Ritchie
Publikováno v:
Journal of Physics B: Atomic, Molecular and Optical Physics. 33:5177-5190
Hydrogen atom-hydrogen atom scattering is a prototype for many of the fundamental principles of atomic collisions. In this work we present the formalism and the predictions of a time-dependent self-consistent-field description of the H + H system for
Autor:
Merle E. Riley, A. Burke Ritchie
Publikováno v:
Journal of Physics B: Atomic, Molecular and Optical Physics. 32:5279-5288
Hydrogen atom - hydrogen atom scattering is a prototype for many of the fundamental principles of atomic collisions. In this work we present an approximation to the H+H system for scattering in the intermediate energy regime of 1 to 100 keV. The appr
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 17:3209-3217
In this paper we report absolute intensities of vacuum ultraviolet and near ultraviolet emission lines (4.8 eV to 18 eV ) for aluminum etching discharges in an inductively coupled plasma reactor. We report line intensities as a function of wafer type
Autor:
Burke Ritchie, Merle E. Riley
Publikováno v:
Physical Review A. 59:3544-3547
An implicit Fast Fourier Transform (FFT) algorithm is implemented to solve the time-dependent Schroedinger equation with application to charge-exchange collisions. Cross sections are calculated for He{sup 2} on H and compared with experiment and othe
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 15:3015-3023
We report on measurements of positive ion energies, current densities, and angular distributions at the grounded electrode of inductively coupled discharges in mixtures of argon and chlorine. We also report on ion species and Langmuir probe measureme
Autor:
Merle E. Riley, Paul A. Miller
Publikováno v:
Journal of Applied Physics. 82:3689-3709
The behavior of rf plasma sheaths has been the subject of much scientific study and also is technologically important for plasma etching and deposition in the manufacture of integrated circuits. This paper presents a semianalytic model of rf sheaths