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Publikováno v:
Plasma Chemistry and Plasma Processing. 43:285-314
Number densities of oxygen atoms, nO, in Ar-O2 mixtures with small initial O2 fractions, $${x}_{{O}_{2}}$$ x O 2 nO, experiments were performed with $${x}_{{O}_{2}}$$ x O 2 = 100 ppm. For such low O2 fractions, the time-dependence of nO in the DBD an