Zobrazeno 1 - 10
of 46
pro vyhledávání: '"Melitz, Wilhelm"'
Publikováno v:
In Microelectronic Engineering 2011 88(4):377-382
Publikováno v:
In Surface Science Reports 2011 66(1):1-27
Publikováno v:
In Surface Science 2011 605(15):1580-1585
Autor:
Shen, Jian, Clemens, Jonathon B., Chagarov, Evgueni A., Feldwinn, Darby L., Melitz, Wilhelm, Song, Tao, Bishop, Sarah R., Kummel, Andrew C., Droopad, Ravi
Publikováno v:
In Surface Science 2010 604(19):1757-1766
Autor:
Melitz, Wilhelm, Kent, Tyler, Kummel, Andrew C., Droopad, Ravi, Holland, Martin, Thayne, Iain
Publikováno v:
Journal of Chemical Physics; 4/12/2012, Vol. 136 Issue 15, p154706, 8p
Autor:
Lee, Joon Sung, Kaufman-Osborn, Tobin, Melitz, Wilhelm, Lee, Sangyeob, Delabie, Annelies, Sioncke, Sonja, Caymax, Matty, Pourtois, Geoffrey, Kummel, Andrew C.
Publikováno v:
Journal of Chemical Physics; 8/7/2011, Vol. 135 Issue 5, p054705, 7p, 3 Diagrams, 3 Graphs
Publikováno v:
Journal of Applied Physics; Jul2011, Vol. 110 Issue 1, p013713, 7p, 4 Color Photographs, 1 Chart, 1 Graph
Autor:
Shen, Jian, Chagarov, Evgueni A., Feldwinn, Darby L., Melitz, Wilhelm, Santagata, Nancy M., Kummel, Andrew C., Droopad, Ravi, Passlack, Matthias
Publikováno v:
Journal of Chemical Physics; 10/28/2010, Vol. 133 Issue 16, p164704, 10p, 9 Diagrams, 2 Graphs
Autor:
Melitz, Wilhelm, Shen, Jian, Lee, Sangyeob, Lee, Joon Sung, Kummel, Andrew C., Droopad, Ravi, Yu, Edward T.
Publikováno v:
Journal of Applied Physics; Aug2010, Vol. 108 Issue 2, p023711, 7p, 1 Color Photograph, 3 Diagrams, 2 Graphs
Autor:
Melitz, Wilhelm
Publikováno v:
Melitz, Wilhelm. (2012). Surface preparation for ALD of High-k dielectrics on InGaAs. UC San Diego: Retrieved from: http://www.escholarship.org/uc/item/7fs7w1tj
The key for a successful gate-first process is when subsequent processing steps cannot degrade the semiconductor, the dielectric, or the oxidesemiconductor interfaces. For silicon, the only commercial ALD high-k fabrication process, which avoids proc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______325::d44eca9358cebb30fa67cb104b291e6c
http://n2t.net/ark:/20775/bb07862674
http://n2t.net/ark:/20775/bb07862674