Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Meliorisz, Balint"'
Publikováno v:
In Microelectronic Engineering 2007 84(5):733-736
Autor:
Gronheid, Roel, Sanders, Daniel P., Nagahara, Seiji, Dinh, Cong Que, Yoshida, Keisuke, Shiraishi, Gosuke, Kondo, Yoshihiro, Yoshihara, Kosuke, Nafus, Kathleen, Petersen, John S., De Simone, Danilo, Foubert, Philippe, Vandenberghe, Geert, Stock, Hans-Jürgen, Meliorisz, Balint
Publikováno v:
Proceedings of SPIE; May 2020, Vol. 11326 Issue: 1 p113260A-113260A-15, 11212756p
Autor:
Goldberg, Kenneth A., Dinh, Cong Que, Nagahara, Seiji, Shiraishi, Gousuke, Minekawa, Yukie, Kamei, Yuya, Carcasi, Michael, Ide, Hiroyuki, Kondo, Yoshihiro, Yoshida, Yuichi, Yoshihara, Kosuke, Shimada, Ryo, Tomono, Masaru, Moriya, Teruhiko, Takeshita, Kazuhiro, Nafus, Kathleen, Biesemans, Serge, Petersen, John S., De Simone, Danilo, Foubert, Philippe, De Bisschop, Peter, Vandenberghe, Geert, Stock, Hans-Jürgen, Meliorisz, Balint
Publikováno v:
Proceedings of SPIE; March 2019, Vol. 10957 Issue: 1 p109571O-109571O-10, 10847540p
Autor:
Gronheid, Roel, Sanders, Daniel P., Nagahara, Seiji, Dinh, Cong Que, Shiraishi, Gosuke, Kamei, Yuya, Nafus, Kathleen, Kondo, Yoshihiro, Carcasi, Michael, Minekawa, Yukie, Ide, Hiroyuki, Yoshida, Yuichi, Yoshihara, Kosuke, Shimada, Ryo, Tomono, Masaru, Takeshita, Kazuhiro, Biesemans, Serge, Nakashima, Hideo, De Simone, Danilo, Petersen, John S., Foubert, Philippe, De Bisschop, Peter, Vandenberghe, Geert, Stock, Hans-Jürgen, Meliorisz, Balint
Publikováno v:
Proceedings of SPIE; March 2019, Vol. 10960 Issue: 1 p109600A-109600A-15, 10850416p
Autor:
Bramati, Arianna, Weichelt, Tina, Stürzebecher, Lorenz, Meliorisz, Balint, Vogler, Uwe, Voelkel, Reinhard
As predicted by Moore's law, the number of components in integrated circuits is ever-growing. Since the mid-1970s the need of smaller and smaller feature sizes in semiconductor manufacturing has encouraged the development of new technologies as Litho
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______610::4b6cc50fd8f2f7d98504ca6ad5a842fe
https://publica.fraunhofer.de/handle/publica/229908
https://publica.fraunhofer.de/handle/publica/229908
Autor:
Bencher, Christopher, Cheng, Joy Y., Lai, Kafai, Meliorisz, Balint, Muelders, Thomas, Welling, Ulrich, Stock, Hans-Jürgen, Marokkey, Sajan, Demmerle, Wolfgang, Liu, Chi-Chun, Chi, Cheng, Guo, Jing
Publikováno v:
Proceedings of SPIE; April 2017, Vol. 10144 Issue: 1 p101440H-101440H-16, 10042577p
Autor:
Meliorisz, Balint, Erdmann, Andreas, Schnattinger, Thomas, Ströner, Ulrich, Scherübl, Thomas, De Bisschop, Peter, Philipsen, Vicky
Publikováno v:
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p70282S-70282S-9, 9p
Akademický článek
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Autor:
Bramati, Arianna, Vogler, Uwe, Meliorisz, Balint, Motzek, Kristian, Hornung, Michael, Voelkel, Reinhard
Publikováno v:
Proceedings of SPIE; September 2011, Vol. 8167 Issue: 1 p81670U-81670U-10, 8085341p
Autor:
Hohle, Christoph K., Gronheid, Roel, Nagahara, Seiji, Carcasi, Michael, Shiraishi, Gosuke, Kamei, Yuya, Nafus, Kathleen, Minekawa, Yukie, Ide, Hiroyuki, Kondo, Yoshihiro, Shiozawa, Takahiro, Yoshida, Keisuke, Enomoto, Masashi, Yoshihara, Kosuke, Nakashima, Hideo, Biesemans, Serge, Shimada, Ryo, Tomono, Masaru, Takeshita, Kazuhiro, Moriya, Teruhiko, Makoto, Hayakawa, Aizawa, Ryo, Konishi, Yoshitaka, Hori, Masafumi, Maruyama, Ken, Nakagawa, Hisashi, Miyake, Masayuki, Nagai, Tomoki, Dei, Satoshi, Naruoka, Takehiko, Shima, Motoyuki, Kimura, Toru, Vandenberghe, Geert, Petersen, John S., De Simone, Danilo, Philippe, Foubert, Stock, Hans-Jürgen, Meliorisz, Balint, Oshima, Akihiro, Tagawa, Seiichi
Publikováno v:
Proceedings of SPIE; March 2018, Vol. 10586 Issue: 1 p1058606-1058606-11