Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Melanie R. Tuck"'
Publikováno v:
Journal of Microelectromechanical Systems. 18:671-678
This paper describes the development of aluminum nitride (AlN) resonant accelerometers that can be integrated directly over foundry CMOS circuitry. Acceleration is measured by a change in resonant frequency of AlN double-ended tuning-fork (DETF) reso
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::68e3d451e6124caa7930259936ba2593
https://doi.org/10.1109/jmems.2009.2020374
https://doi.org/10.1109/jmems.2009.2020374
Publikováno v:
Sensors and Actuators A: Physical. :87-93
Microfabricated acoustic crystals have been designed and experimentally verified. The acoustic crystals are realized by including tungsten (W) scatterers in a SiO2 matrix. Wide frequency ranges where acoustic waves are forbidden to exist (acoustic ba
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::06624f0a34642c04da8f4c402fce1fbf
https://doi.org/10.1016/j.sna.2007.10.081
https://doi.org/10.1016/j.sna.2007.10.081
Autor:
Ihab El-Kady, Roy H. Olsson, Frederick B. McCormick, James G. Fleming, Mehmet F. Su, Melanie R. Tuck
Phononic crystals (or acoustic crystals) are the acoustic wave analogue of photonic crystals. Here a periodic array of scattering inclusions located in a homogeneous host material forbids certain ranges of acoustic frequencies from existence within t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e3c8b13205ec1cc32acf143074580751
https://doi.org/10.2172/984095
https://doi.org/10.2172/984095
Publikováno v:
2009 IEEE International Ultrasonics Symposium.
Width extensional (WE) super high frequency (SHF) aluminum nitride (AlN) resonators have been fabricated using optical lithography. Solidly anchored WE resonators were shown to be superior to beam anchored resonators of the same size and it was verif
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::13c442d4d5bee6d59c311beb0e52ce27
https://doi.org/10.1109/ultsym.2009.5441802
https://doi.org/10.1109/ultsym.2009.5441802
Publikováno v:
2009 IEEE International Ultrasonics Symposium.
Widely applied to RF filtering, AlN microresonators offer the ability to perform additional functions such as impedance matching and single-ended-to-differential conversion. This paper reports microresonators capable of transforming the characteristi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a7ddecc47237ae57f25c755378726bc5
https://doi.org/10.1109/ultsym.2009.5441872
https://doi.org/10.1109/ultsym.2009.5441872
Publikováno v:
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
Aluminum nitride (AlN) contour mode resonators have been of interest because of their high quality factor, low impedance, large number of frequencies on a single chip and compatibility with CMOS processes [1–3]. While AlN low insertion loss filters
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aade3fcbae27f56c1266b9d4801f8bf3
https://doi.org/10.1109/sensor.2009.5285626
https://doi.org/10.1109/sensor.2009.5285626
Publikováno v:
2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a8fee22f8890c1067b15eccdb950e7c1
https://doi.org/10.31438/trf.hh2008.96
https://doi.org/10.31438/trf.hh2008.96
Publikováno v:
2008 IEEE International Frequency Control Symposium.
This paper reports the development of narrow-bandwidth, post-CMOS compatible aluminum nitride (AlN) MEMS filters operating in the very (VHF) and ultra (UHF) high frequency bands. Percent bandwidths less than 0.1% are achieved utilizing a mechanically
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f3d2aee1b5d173eecef3a00c4ae2b95a
https://doi.org/10.1109/freq.2008.4623077
https://doi.org/10.1109/freq.2008.4623077
Publikováno v:
2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum.
This paper reports post-CMOS compatible aluminum nitride (AlN) MEMS resonators, filters, and resonant sensors for the miniaturization of radio-frequency transceivers and sensor systems. Utilizing a resonator with two closely spaced modes, 2nd order M
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::68033a78bd1133ffe053fb5ad3f759d8
https://doi.org/10.1109/freq.2007.4319108
https://doi.org/10.1109/freq.2007.4319108
Publikováno v:
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
A MEMS bulk wave acoustic bandgap has been designed and experimentally verified. The acoustic bandgaps are realized by including tungsten (W) scatterers in a SiO2 matrix. Wide frequency ranges where acoustic waves are forbidden to exist are formed du
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7fdd399ed5b48c45e6c35ef5049395f5
https://doi.org/10.1109/sensor.2007.4300132
https://doi.org/10.1109/sensor.2007.4300132