High speed maskless lithography of printed circuit boards using digital micromirrors.

Autor: Hansotte, Eric J., Carignan, Edward C., Meisburger, W. Dan

Publikováno v: Proceedings of SPIE; Nov2011, Issue 1, p793207-793207-14, 14p

Correcting for global space charge by positive ion generation.

Autor: Crane, Trevor, Campbell, Colin, Pickard, Dan, Han, Liqun, Takahashi, Kimitoshi, Meisburger, W. Dan, Pease, R. Fabian

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 6, p2709-2712, 4p

Scaled measurements of global space-charge induced image blur in electron beam projection system.

Autor: Han, Liqun, Pease, R. Fabian, Meisburger, W. Dan, Winograd, Gil I., Takahashi, Kimitoshi

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 6, p2999-3003, 5p