Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Meik Panitz"'
Publikováno v:
Extreme Ultraviolet (EUV) Lithography XI.
This paper describes the successful combination of masking or beam shaping elements based on thin membranes with the thermally ultra-stable properties of the ULE [1] glass substrate material. These kind of elements can be used in transmission in the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::38f4eb36ca7bdaf1c8a57ebe8b18f192
https://doi.org/10.1117/12.2551869
https://doi.org/10.1117/12.2551869
