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pro vyhledávání: '"Mei Gi Toh"'
Autor:
Fen Lin, Mei Gi Toh, Maung Thway, Xinhang Li, Naomi Nandakumar, Xavier Gay, Bas Dielissen, Samuel Raj, Armin G. Aberle
Publikováno v:
Japanese Journal of Applied Physics. 56:08MB01
In this work, we investigate the impact of light illumination on crystalline silicon surfaces passivated with inline atomic layer deposited aluminum oxide capped with plasma-enhanced chemical vapor deposited silicon nitride. It is found that, for ded
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::052b51cfe327685a3f741d6e9ee9b7a0
https://doi.org/10.7567/jjap.56.08mb01
https://doi.org/10.7567/jjap.56.08mb01
