Copper device editing: Strategy for focused ion beam milling of copper.

Autor: Casey, J. David, Phaneuf, Michael, Chandler, Clive, Megorden, Michael, Noll, Kathryn E., Schuman, Richard, Gannon, Thomas J., Krechmer, Alex, Monforte, David, Antoniou, Nicholas, Bassom, Neil, Li, Jian, Carleson, Peter, Huynh, Chuong

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 6, p2682-2685, 4p