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Autor:
M. Goedbloed, Marcel A. G. Zevenbergen, Van Anh T. Dam, Geert Altena, R. van Schaijk, H. Berney, Mcguinness Patrick Martin, Berduque Alfonso, Thomas G. O'Dwyer, Pawel Bembnowicz
Publikováno v:
2016 IEEE International Electron Devices Meeting (IEDM).
We present for the first time a miniaturized multi ion-selective sensor to simultaneously determine pH and chloride (Cl−) levels in fluid. The sensor combines solid state iridium oxide (IrOx) and silver chloride (AgCl) electrodes fabricated on a Si