Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Maynard, H. L."'
Autor:
Watson, Pat G., Kroyan, Armen, Cirelli, Raymond A., Maynard, H. L., Sweeney, James R., Klemens, Fred P., Timp, G. L., Nalamasu, Omkaram
Publikováno v:
Proceedings of SPIE; Nov1999, Issue 1, p320-328, 9p
Autor:
Kopf, R. F., Melendes, R., Jacobson, D. C., Tate, A., Melendes, M. A., Reyes, R. R., Hamm, R. A., Yang, Y., Frackoviak, J., Weimann, N. G., Maynard, H. L., Liu, C. T.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 3, p871-875, 5p
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1997, Vol. 15 Issue 3, p646-651, 6p
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 4, p2574-2581, 8p
Autor:
Lee, J. T. C., Layadi, N., Guinn, K. V., Maynard, H. L., Klemens, F. P., Ibbotson, D. E., Tepermeister, I., Egan, P. O., Richardson, R. A.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 4, p2510-2518, 9p
Autor:
Hershkowitz, N., Maynard, H. L.
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1993, Vol. 11 Issue 4, p1172-1178, 7p
Autor:
Ding, J., Jenq, J.-S., Kim, G.-H., Maynard, H. L., Hamers, J. S., Hershkowitz, N., Taylor, J. W.
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1993, Vol. 11 Issue 4, p1283-1288, 6p
Plasma etching of submicron devices: in situ monitoring and control by multi-wavelength ellipsometry
Publikováno v:
Thin Solid Films; 1998, Vol. 313 Issue: 1 p398-405, 8p