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pro vyhledávání: '"Maxim Vanrusselt"'
Autor:
Maxim Vanrusselt, Han Haitjema
Publikováno v:
CIRP Annals.
An international comparison of surface topography flatness deviation was carried out. The comparison involved twelve optical surface topography instruments (focus variation instruments, confocal microscopes and coherence scanning interferometers) fro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::18e2f177e6dfc5b1039b47e88066ce52
https://lirias.kuleuven.be/handle/20.500.12942/698623
https://lirias.kuleuven.be/handle/20.500.12942/698623
Publikováno v:
Surface Topography: Metrology and Properties. 9:025015
An international comparison of surface topography measurement noise was carried out. The comparison involved twelve optical surface topography instruments (focus variation instruments, confocal microscopes and coherence scanning interferometers) from