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pro vyhledávání: '"Max Ti-Koung Hou"'
Publikováno v:
Micromachining and Microfabrication Process Technology XI.
Micro-Rings have been widely used for measurement of residual tensile stress in thin films. This measurement approach provides a simple and convenient way to estimate the stress. However, it still lacks accuracy compared to other methods. In this stu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::34f03afb335e7e485b95282a5f7b1e74
https://doi.org/10.1117/12.641154
https://doi.org/10.1117/12.641154
