Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Max Schoengen"'
Publikováno v:
Journal of Analytical Atomic Spectrometry
Grazing incidence X-ray fluorescence spectra of nano-scaled periodic line structures were recorded at the four crystal monochromator beamline in the laboratory of the Physikalisch-Technische Bundesanstalt at the synchrotron radiation facility BESSY I
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::01c895afa378597f7408ccf7717c87c7
Autor:
Michael Krumrey, Jan Wernecke, Victor Soltwisch, Sven Burger, Anton Haase, Max Schoengen, Juergen Probst, Frank Scholze
Publikováno v:
Physical Review B
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering. To support an improved reconstruction of nanostructured surface geometries, we investigated the origin of the contributions to the diffuse scatte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::42f0ecf0faec858837eced560552e8a4
Autor:
Gyözö Garab, Gernot Renger, Max Schoengen, Franz-Josef Schmitt, Petar H. Lambrev, Sabine Kussin, Zsuzsanna Várkonyi, Hans Joachim Eichler
Publikováno v:
Biochimica et Biophysica Acta (BBA) - Bioenergetics. 1807:1022-1031
The functional domain size for efficient excited singlet state quenching was studied in artificial aggregates of the main light-harvesting complex II (LHCIIb) from spinach and in native thylakoid membranes by picosecond time-resolved fluorescence spe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::46a48b37c805adb10e476f922d120f5b
https://doi.org/10.1016/j.bbabio.2011.05.003
https://doi.org/10.1016/j.bbabio.2011.05.003
Publikováno v:
Photonics and Nanostructures - Fundamentals and Applications. 9:248-254
The integration of photonic crystals into optical circuits is a decisive factor for further development of photonic crystal applications. The feasibility of these applications depends on fabrication technologies suitable for mass production. In this
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::80852004ddd6058e8c9c5efc6e94b5fd
https://doi.org/10.1016/j.photonics.2011.04.007
https://doi.org/10.1016/j.photonics.2011.04.007
Autor:
Bernd Löchel, Carlo Barth, Andreas W. Schell, Max Schoengen, Stefan Kowarik, Janik Wolters, Oliver Benson, Jürgen Probst
Publikováno v:
'Optics Express ', vol: 23, pages: 9803-1-9811 (2015)
We report on an experimental and theoretical investigation of an integrated Bragg-like grating coupler for near-vertical scattering of light from photonic crystal waveguides with an ultra-small footprint of a few lattice constants only. Using frequen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::55ef977d6248695ee5bdbbfb13b32232
https://pubmed.ncbi.nlm.nih.gov/25969021
https://pubmed.ncbi.nlm.nih.gov/25969021
Autor:
Jürgen Probst, Alexander Diener, Max Schoengen, Matthias Wurm, Bernd Bodermann, Johannes Endres
Publikováno v:
Optics Express. 25:2460
In this contribution we demonstrate goniometric scatterometry measurements of gratings with linewidths down to 25 nm on silicon wafers with an inspection wavelength of 266 nm. For each sample, measurements have been performed in four different config
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d8cad38cae629e86d703678afe47a047
https://doi.org/10.1364/oe.25.002460
https://doi.org/10.1364/oe.25.002460
Autor:
Jan Wernecke, Max Schoengen, Sven Burger, Anton Haase, Jan Pomplun, Jürgen Probst, Victor Soltwisch, Frank Scholze, Michael Krumrey
Publikováno v:
SPIE Proceedings.
Non-imaging techniques like X-ray scattering are supposed to play an important role in the further development of CD metrology for the semiconductor industry. Grazing Incidence Small Angle X-ray Scattering (GISAXS) provides directly assessable inform
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4d6ebd60120b86df3f3f37c31ebf2196
https://doi.org/10.1117/12.2066165
https://doi.org/10.1117/12.2066165
Autor:
Bernd Loechel, Poul-Erik Hansen, Juergen Probst, Bernd Bodermann, Gaoliang Dai, Jan Wernecke, Frank Scholze, Johannes Endres, Michael Krumrey, Victor Soltwisch, Max Schoengen
Publikováno v:
Optical Micro- and Nanometrology V.
Scatterometry is a common technique for dimensional characterisation of nanostructures in the semiconductor industry. Currently this technique is limited to relative measurements for process development and process control. Although the high sensitiv
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::177ff6eb3c698be9f391f9c432f074ab
https://doi.org/10.1117/12.2052278
https://doi.org/10.1117/12.2052278
Autor:
Michael Krumrey, Frank Scholze, Jan Wernecke, Max Schoengen, Jürgen Probst, Victor Soltwisch, Anton Haase
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXVIII.
The aim of the semiconductor industry to decrease the feature size of integrated circuits poses a huge technological endeavor. Consequently, new challenges are arising for metrology on structures in the nanometer regime. Scatterometry is a fast metho
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::11ecb2f0b56a83dcbec94de6c79032aa
https://doi.org/10.1117/12.2046212
https://doi.org/10.1117/12.2046212
Autor:
Andreas W. Schell, Tobias Hanke, Bernd Löchel, Rudolf Bratschitsch, Thomas Aichele, Max Schoengen, Alfred Leitenstorfer, Nils Nüsse, Günter Kewes, Janik Wolters, Oliver Benson
Publikováno v:
physica status solidi (b). 249
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::210cb50d252abfe10dfb8c01f90be366
https://doi.org/10.1002/pssb.201290009
https://doi.org/10.1002/pssb.201290009