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of 3
pro vyhledávání: '"Maurice, C.Y.M."'
Publikováno v:
Frontiers in low temperature plasma diagnostics IV : papers, Rolduc Conference Centre, The Netherlands, 25.03.2001-29.03.2001, 213-216
STARTPAGE=213;ENDPAGE=216;TITLE=Frontiers in low temperature plasma diagnostics IV : papers, Rolduc Conference Centre, The Netherlands, 25.03.2001-29.03.2001
STARTPAGE=213;ENDPAGE=216;TITLE=Frontiers in low temperature plasma diagnostics IV : papers, Rolduc Conference Centre, The Netherlands, 25.03.2001-29.03.2001
In the last years, interest for high densities etching sources has rose dramatically in the semiconductor industry. Process machines need to be adapted to the manufacturer leitmotiv " as small as possible" and achieve at the same time a high aspect r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::affd6e56ffd9b8cbe9414f61cb85a7f2
https://research.tue.nl/nl/publications/bef71ebf-9132-405e-ab49-e2ba032d1fb7
https://research.tue.nl/nl/publications/bef71ebf-9132-405e-ab49-e2ba032d1fb7
Autor:
Maurice, C.Y.M., Grift, van de, M., Hbid, T., Kroesen, G.M.W., Sadeghi, N., Doebele, H.F., Muraoka, K.
Publikováno v:
Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September-1 October 1999, 308-313
STARTPAGE=308;ENDPAGE=313;TITLE=Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September-1 October 1999
STARTPAGE=308;ENDPAGE=313;TITLE=Proceedings of the 9th international symposium on laser-aided plasma diagnostics : Lake Tahoe, California, USA, 26 September-1 October 1999
After the work done by M. van de Grift and N. Sadeghi on the ion velocity distribution in an ICP, some new measurements are planned for the future to extend their results. In this paper we will describe these results and the drawn conclusions which m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::2229a522298cd065793540f2cf6314e6
https://research.tue.nl/nl/publications/1e54d3fd-a10a-4234-a1fb-5133431582f4
https://research.tue.nl/nl/publications/1e54d3fd-a10a-4234-a1fb-5133431582f4