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pro vyhledávání: '"Mattias Ahlstedt"'
Autor:
Günther Schindler, Rainer Waser, Walter Hartner, Mattias Ahlstedt, Christine Dehm, Carlos Mazure, Herbert Schroeder, Volker Weinrich
Publikováno v:
Integrated Ferroelectrics. 27:213-225
After patterning the Platinum/crystalline SrBi2Ta2O9 bilayer by Argon based Reactive Ion Etching (RIE), a degradation of the remanent polarization and leakage current of the capacitors for smaller feature sizes is observed. To simulate the study of t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8b2d9079cd219adbd4c01ad8459afb2a
https://doi.org/10.1080/10584589908228470
https://doi.org/10.1080/10584589908228470
