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pro vyhledávání: '"Matthias Uhlig"'
Autor:
Christian Wenzel, Johann W. Bartha, D. Zeidler, Thomas Gessner, Stefan E. Schulz, Andreas Bertz, J.-W. Erben, Matthias Uhlig
Publikováno v:
Microelectronic Engineering. 70:314-319
The integration of ultra low k materials in copper damascene architecture is one of the main issues in finding microelectronic-process-compatible dielectric materials. The aim of this paper is to show the integration conformity with common equipment
Autor:
Matthias Uhlig, Jef Poortmans, Jean-Francois de Marneffe, Eddy Kunnen, Werner Boullart, B. Rau, Kaidong Xu, Boon Teik Chan
Publikováno v:
Japanese Journal of Applied Physics. 51:10NA01
Surface texturing is an imperative process to reduce the reflection of the incident light on solar cells, by enhancing sunlight diffusion into the silicon solar cells for photon generation. As a result, the current generation can be increased. In thi
Publikováno v:
Journal of Urology. 137