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pro vyhledávání: '"Matthias Schoeps"'
Autor:
Ralf Hupfer, Matthias Schoeps, Robert Schmaler, Thorsten Schmidt, Joerg Luebke, Christian Hammel
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 30:440-447
Due to reasons like higher flexibility demands, smaller lot sizes in production, and tool upgrades leading to higher throughputs, existing automated material handling systems are facing ever rising requirements. At the same time, the potential to upg
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2d4d4c493f1a27ab85e54f2b9c27061
https://doi.org/10.1109/tsm.2017.2756104
https://doi.org/10.1109/tsm.2017.2756104
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Integration of transport system information into Manufacturing Execution System (MES) dispatching rules is not yet standard practice. Yet, it could be helpful in several areas of a semiconductor fabrication plant. For example, to react to system fail
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::884e6b4424ca67c92f83cabe7da022b5
https://doi.org/10.1109/asmc.2016.7491110
https://doi.org/10.1109/asmc.2016.7491110