Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Matthias Bening"'
Publikováno v:
International Optical Design Conference 2017.
In this work, we show how to predict the polarization-performance of high-numerical aperture optical systems. Various important influences, such as coating-induced phase change, stress induced birefringence, or the quality of the raw material are inv
Publikováno v:
SPIE Proceedings.
Along the course of increasing through-put and improving signal to noise ratio in optical wafer and mask inspection, demands on wave front aberrations and polarization characteristics are ever increasing. The system engineers and optical designers in
Autor:
Uwe Schuhmann, Jörg Wunderlich, Hans-Jürgen Feige, Lutz Reichmann, Matthias Bening, Helmut Bernitzki, Jürgen Finster, Peter Triebel
Publikováno v:
SPIE Proceedings.
Today’s high brilliance Laser sources cause huge thermal effects on optical components, affecting process stability. This paper shows the holistic approach to the improvement of objective lenses to minimum thermal effects as focus shift. A new appr
Autor:
Oliver Falkenstörfer, Marco Bornschein, Lutz Reichmann, Thomas Schletterer, Matthias Bening, Ullrich Krüger
Publikováno v:
SPIE Proceedings.
Jenoptik Laser, Optik, Systeme GmbH has developed a new mounting technology for optical elements. It is free of any glue or other organic material whereby it is excellently appropriate to the use for DUV Systems, especially if high intensity occurs a
Publikováno v:
The Lens
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::06236b678566a9d45339d3462b1f34ec
https://www.lens.org/134-871-640-509-60X
https://www.lens.org/134-871-640-509-60X