Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Matthew W. Losey"'
Autor:
D. M. Skala, Stewart K. Griffiths, Nancy Y. C. Yang, Georg Aigeldinger, L L Hunter, Dale R. Boehme, John T. Hachman, Thomas A. Friedmann, Cheryl A. Hauck, P C Y Yang, J S Korellis, Dorrance E. McLean, Matthew W. Losey, Michelle A. Hekmaty, Wei-Yang Lu, James J. Kelly
Publikováno v:
Journal of Micromechanics and Microengineering. 15:1700-1712
Resist substrates used in the LIGA process must provide high initial bond strength between the substrate and resist, little degradation of the bond strength during x-ray exposure, acceptable undercut rates during development and a surface enabling go
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::13b0024c39ee9fd4845c973c8ba546bd
https://doi.org/10.1088/0960-1317/15/9/012
https://doi.org/10.1088/0960-1317/15/9/012
Autor:
Samara L. Firebaugh, Matthew W. Losey, Martin A. Schmidt, Rebecca J. Jackman, Klavs F. Jensen
Publikováno v:
Journal of Microelectromechanical Systems. 11:709-717
Using silicon microfabrication technology, microchemical devices have been constructed for the purpose of conducting heterogeneously catalyzed multiphase reactions. The motivation behind the design, the fabrication approach, and the experimental char
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a7590de11adebc51149c01c40e2f88ac
https://doi.org/10.1109/jmems.2002.803416
https://doi.org/10.1109/jmems.2002.803416
Publikováno v:
AIChE Journal. 47:1639-1647
A silicon micropacked-bed reactor for phosgene synthesis is demonstrated as an example of the potential for safe on-site/on-demand production of a hazardous compound. Complete conversion of chlorine is observed for both a 2:1 CO/Cl 2 feed at 4.5 std.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c595131edf56b0b72910f4cffd2d4d9b
https://doi.org/10.1002/aic.690470716
https://doi.org/10.1002/aic.690470716
Publikováno v:
Industrial & Engineering Chemistry Research. 40:2555-2562
A microchemical device has been built in silicon and glass by using microfabrication methods including deep-reactive-ion etch technology, photolithography, and multiple wafer bonding. The microchemical system consists of a microfluidic distribution m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::274dfcb53dff60f29138fc48c5a7d051
https://doi.org/10.1021/ie000523f
https://doi.org/10.1021/ie000523f
Autor:
James J. Kelly, Matthew W. Losey
The fundamental principles of electrodeposition are reviewed, with emphasis on the processes and materials science most relevant to microsystems. Some of the issues associated with electroplating or electroforming through lithographic patterns are co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9cf682bacfd8f68a01d702cc9c9653f1
https://doi.org/10.1016/b978-044452190-3.00010-0
https://doi.org/10.1016/b978-044452190-3.00010-0
Autor:
Chu-Yeu Peter Yang, Wei-Yang Lu, Georg Aigeldinger, Cheryl A. Hauck, John T. Hachman, Michelle A. Hekmaty, James J. Kelly, D. M. Skala, John S. Korellis, Thomas A. Friedmann, Dorrance E. McLean, Luke L. Hunter, Matthew W. Losey, Stewart K. Griffiths, Nancy Y. C. Yang, Dale R. Boehme
Resist substrates used in the LIGA process must provide high initial bond strength between the substrate and resist, little degradation of the bond strength during x-ray exposure, acceptable undercut rates during development, and a surface enabling g
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::16ad662c53387182b8df20236c5aa20a
https://doi.org/10.2172/923166
https://doi.org/10.2172/923166
Publikováno v:
Microreaction Technology: Industrial Prospects ISBN: 9783642641046
A microchemical device has been fabricated using deep-reactive-ion etch technology for the purpose of gas-liquid contacting and for use as a micro packed-bed reactor. A 4 µL volume reaction chamber holds the packing as reactants are fed continuously
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc8547ef3c510da681edba7f9478a40b
https://doi.org/10.1007/978-3-642-59738-1_28
https://doi.org/10.1007/978-3-642-59738-1_28
Publikováno v:
Microreaction Technology: Industrial Prospects ISBN: 9783642641046
A novel liquid-phase microreactor with thin film temperature sensing, good thermal management, and fast mixing has been fabricated for the production of hazardous specialty chemicals, specifically for organic peroxides. The reactor has been character
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7f5176b270c5200380359f447dfc2c25
https://doi.org/10.1007/978-3-642-59738-1_16
https://doi.org/10.1007/978-3-642-59738-1_16
Publikováno v:
Journal of The Electrochemical Society. 153:D177
The nucleation and electrodeposition of copper from a pyrophosphate electrolyte onto anodized thin-film aluminum was used to provide well-adhering electroforms in high aspect-ratio resist molds made by X-ray lithography. Cyclic voltammetry and chrono
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fb5c7901bc93650740df1a2068eb75d4
https://doi.org/10.1149/1.2354453
https://doi.org/10.1149/1.2354453