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pro vyhledávání: '"Matthew V. Gallegos"'
Autor:
Mark A. Rodriguez, Jamin Pillars, Nichole R. Valdez, James J. M. Griego, Matthew V. Gallegos, John A. Krukar, Andrew Polonsky, Steven L. Wolfley
Publikováno v:
Powder Diffraction. 37:52-61
Tungsten (W) films have many applications in the semiconducting industry for sensor technology. Deposition conditions can significantly impact the resulting W films in terms of the phases present (α-BCC or β-A12), microstructural grain orientation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa6078d9c66999fdf5b454f2444f3689
https://doi.org/10.1017/s0885715622000203
https://doi.org/10.1017/s0885715622000203
