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of 9
pro vyhledávání: '"Matthew Tedaldi"'
Autor:
David Ockwell, Lawrence Mudarikwa, Jenny Goulden, Lei Feng, Andrew D. L. Humphris, Matthew Tedaldi
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIV.
The Rapid Probe Microscope (RPM), exists as an integrated solution for photomask repair, with its application extended to include wafer metrology in 2016 [1]. The RPM can acquire non-destructive, high resolution, sub-nm detail in all 3 dimensions, ov
Autor:
Paul Köchert, Andrew Yacoot, Antti Lassila, P. Balling, Jeremias Seppä, Matthew Tedaldi, Nicola Bancone, Gian Bartolo Picotto, Jens Flügge, Mehmet Celik, Christoph Weichert, Petr Kren, Ersoy Sahin, Ramiz Hamid, Cengiz Birlikseven, Ulrich Kuetgens, Marco Pisani
Publikováno v:
Pisani, M, Yacoot, A, Balling, P, Bancone, N, Birlikseven, C, Celik, M, Flügge, J, Hamid, R, Köchert, P, Kren, P, Kuetgens, U, Lassila, A, Picotto, G B, Sahin, E, Seppä, J, Tedaldi, M & Weichert, C 2012, ' Comparison of the performance of the next generation of optical interferometers ', Metrologia, vol. 49, no. 4, pp. 455-467 . https://doi.org/10.1088/0026-1394/49/4/455
Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are
Publikováno v:
SPIE Proceedings.
Current methods to characterise specific properties of polymeric nanocomposites (PNCs), such as particle loading and dispersion profile, rely on a number of techniques that require special sample preparation and treatment, are very expensive, require
Publikováno v:
Optics letters. 35(22)
The particle loading and dispersion profiles are two significant properties directly affecting the engineering properties and performance characteristics of polymer nanocomposites. Current measurement techniques are often destructive, require special
Publikováno v:
SPIE Proceedings.
In this paper a novel method for determining refractive indices of a multi-layered samples using low coherence interferometry (LCI), developed at the National Physical Laboratory, UK, is introduced. Conventional Optical Coherence Tomography (OCT) uti
Publikováno v:
Optics letters. 33(19)
We introduce a novel approach to refractometry using a low coherence interferometer at multiple angles of incidence. We show that for plane parallel samples it is possible to measure their phase refractive index rather than the group index that is us
Publikováno v:
SPIE Proceedings.
Two significant figures of merit for optical coherence tomography (OCT) systems are the axial and transverse resolutions. Transverse resolution has been defined using the Rayleigh Criterion or from Gaussian beam optics. The axial resolution is genera
Publikováno v:
SPIE Proceedings.
A novel dual angle optical coherence tomography (OCT) method is developed that has been termed stereoscopic OCT, highlighting the similarities between this technique and stereoscopic ranging. OCT images are obtained at two angles of incidence with re
Autor:
Andrew Yacoot, Claudiu Giusca, Lakshmi Nimishakavi, Matthew Tedaldi, Richard Leach, Wenjuan Sun, James D. Claverley, Christopher W. Jones
Publikováno v:
Measurement Science and Technology. 23:074002
The National Physical Laboratory, UK, has been active in the field of engineering nanometrology for a number of years. A summary of progress over the last five years is presented in this paper and the following research projects discussed in detail.