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pro vyhledávání: '"Matt Smalley"'
Autor:
Jeremiah Hebding, Dan Pascual, Corbet Johnson, Phung Nguyen, Matt Smalley, Vladimir Stojanovic, Tuan Vo, Gerald Leake, Michele Moresco, Doug La Tulipe, Douglas D. Coolbaugh, Michael R. Watts, Paul Tariello, Anh Nguyen, Erman Timurdogan, John Mucci, Colin McDonough
Publikováno v:
Journal of Microelectronics and Electronic Packaging. 13:71-76
A fully functional Si photonics and 65-nm complementary metal-oxide semiconductor (CMOS) heterogeneous three-dimensional (3-D) integration is demonstrated for the first time in a 300-mm production environment. Direct oxide wafer bonding was developed