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pro vyhledávání: '"Mathioudakis, Simon"'
Autor:
Bhaskar, Priyamvada, Mathioudakis, Simon, Olschewski, Tim, Muckel, Florian, Bindel, Jan Raphael, Pratzer, Marco, Liebmann, Marcus, Morgenstern, Markus
We present a mask aligner driven by three piezo motors which guides and aligns a SiN shadow mask under capacitive control towards a sample surface. The three capacitors for read out are located at the backside of the thin mask such that the mask can
Externí odkaz:
http://arxiv.org/abs/1801.02540
