Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Mathijssen, Simon G.J."'
Autor:
Brongersma, Hidde H., Grehl, Thomas, van Hal, Paul A., Kuijpers, Niels C.W., Mathijssen, Simon G.J., Schofield, Emma R., Smith, Richard A.P., ter Veen, Hendrik R.J.
Publikováno v:
In Vacuum 2010 84(8):1005-1007
Autor:
Andringa, Anne-Marije1,2 anne-marije.andringa@philips.com, Spijkman, Mark-Jan1,2, Smits, Edsger C.P.3, Mathijssen, Simon G.J.2,4, Hal, Paul A. van2, Setayesh, Sepas2, Willard, Nico P.2, Borshchev, Oleg V.5, Ponomarenko, Sergei A.5, Blom, Paul W.M.1,3, de Leeuw, Dago M.1,2 dago.de.leeuw@philips.com
Publikováno v:
Organic Electronics. May2010, Vol. 11 Issue 5, p895-898. 4p.
Autor:
Ding, S.
Lithography steppers need a level sensor to measure the vertical position of wafer surface relative to the lens system. The problem is photoresist is transparent to UV light. Thus the layer below the resist will be seen by the level sensor. We invest
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::c5d7fdcab6c1f9cf53586db47c3dc46a
https://research.tue.nl/nl/publications/60a5d3f1-92fc-4c35-8632-0cfa2b65807e
https://research.tue.nl/nl/publications/60a5d3f1-92fc-4c35-8632-0cfa2b65807e
