Summary of ISO/TC 201 International Standard ISO 18516:2019 Surface chemical analysis-Determination of lateral resolution and sharpness in beam-based methods with a range from nanometres to micrometres and its implementation for imaging laboratory X-ray photoelectron spectrometers (XPS)

Autor: Mathias Senoner, Cristiana Passiu, Nicholas D. Spencer, Vincent Fernandez, Jörg M. Stockmann, Antonella Rossi, Wolfgang E. S. Unger, Neal Fairley

Publikováno v: Surface and Interface Analysis, 54 (4)
Surface and Interface Analysis
Surface and Interface Analysis, Wiley-Blackwell, 2021, pp.108165. ⟨10.1002/sia.7025⟩

ISO 18516:2019 Surface chemical analysis-Determination of lateral resolution and sharpness in beam-based methods with a range from nanometres to micrometres revises ISO 18516:2006 Surface chemical analysis-Auger electron spectroscopy and X-ray photoe

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f11d19eb200825ebf056d0174908a331
https://hdl.handle.net/20.500.11850/519229

Introduction to lateral resolution and analysis area measurements in XPS

Autor: Mathias Senoner, Wolfgang E. S. Unger, Thomas Weimann, Jörg M. Stockmann, Antonella Rossi, Sebastian Bütefisch, Cristiana Passiu, Nicholas D. Spencer

Publikováno v: Journal of Vacuum Science & Technology A. 38:053206

Imaging and small-spot (small area) XPS have become increasingly important components of surface chemical analysis during the last three decades, and its use is growing. Some ambiguity in the use of terminology, understanding of concepts, and lack of

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3359b74c1c5efd01114e8fba06ea29ce
https://doi.org/10.1116/6.0000398

Lateral resolution of secondary ion mass spectrometry–results of an inter-laboratory comparison

Autor: Mathias Senoner, Wolfgang E. S. Unger

Publikováno v: Surface and Interface Analysis. 39:16-25

Recently, BAM organised an inter-laboratory comparison focussed on lateral resolution and accuracy of sub-micron length measurements by secondary ion mass spectrometry (SIMS). Results were submitted by 16 laboratories from 10 countries. The task was

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d039dacf18252c680f205b98cc3d57d3
https://doi.org/10.1002/sia.2453

Lateral resolution of nanoscaled images delivered by surface-analytical instruments: application of the BAM-L200 certified reference material and related ISO standards

Autor: H. Rooch, M. Malcher, Vasile-Dan Hodoroaba, Steffi Rades, Wolfgang E. S. Unger, M. Schmidt, Mathias Senoner, A. Maaßdorf, Werner Österle, D. Paul, F. Kollmer

Publikováno v: Analytical and bioanalytical chemistry. 407(11)

The certified reference material BAM-L200, a nanoscale stripe pattern for length calibration and specification of lateral resolution, is described. BAM-L200 is prepared from a cross-sectioned epitaxially grown layer stack of AlxGa1−xAs and InxGa1�

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::28119c2a04d2ca57a02bb1d009525168
https://pubmed.ncbi.nlm.nih.gov/25701415

Advanced thin film technology for ultrahigh resolution X-ray microscopy

Autor: Konstantins Jefimovs, Jörg Raabe, Mikko Ritala, Christian David, Joan Vila-Comamala, Rainer H. Fink, Mathias Senoner, Tero Pilvi, A. Maassdorf

Publikováno v: Ultramicroscopy. 109(11)

Further progress in the spatial resolution of X-ray microscopes is currently impaired by fundamental limitations in the production of X-ray diffractive lenses. Here, we demonstrate how advanced thin film technologies can be applied to boost the fabri

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e2f1a923d83a62bf7f5af1530d918807
https://pubmed.ncbi.nlm.nih.gov/19640649