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pro vyhledávání: '"Mathew Pellow"'
Autor:
Anil Raj Duggal, Marc Schaepkens, Tae Won Kim, Min Yan, John Deluca, Ahmet Gun Erlat, Mathew Pellow, Paul Alan Mcconnelee, Thomas Paul Feist
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:971-977
We have developed a coating technology to reduce the moisture permeation rate through a polycarbonate plastic film substrate to below 1×10−5g∕m2∕day using plasma-enhanced chemical vapor deposition. Unlike other ultrahigh barrier (UHB) coatings