Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Matamis, George"'
Publikováno v:
Microscale Thermophysical Engineering. Feb1998, Vol. 2 Issue 1, p31-36. 6p.
Publikováno v:
Proceedings of SPIE; Nov2000 Part 2, Issue 1, p267-278, 12p
Development of a low-stress silicon-rich silicon nitride film for micromachined sensor applications.
Publikováno v:
Proceedings of SPIE; Nov2000 Part 2, Issue 1, p436-442, 7p