Zobrazeno 1 - 10
of 45
pro vyhledávání: '"Masayuki Furuhashi"'
Autor:
Masayuki Furuhashi, Masazumi Fujiwara, Takahito Ohshiro, Makusu Tsutsui, Kazuki Matsubara, Masateru Taniguchi, Shigeki Takeuchi, Tomoji Kawai
Publikováno v:
AIP Advances, Vol 1, Iss 3, Pp 032102-032102-5 (2011)
An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricat
Externí odkaz:
https://doaj.org/article/dcc9661651054a5fafc0a5be4c04f25b
Autor:
Masayuki Furuhashi, Satoshi Yamakawa, Kazuo Tsutsui, Hiroshi Iwai, Hitoshi Wakabayashi, Yiming Lei, Shingo Tomohisa, Kuniyuki Kakushima
Publikováno v:
Microelectronics Reliability. 84:226-229
Electrical characteristics of SiC metal-oxide-semiconductor (MOS) capacitors with atomic-layer-deposited SiO2 (ALD-SiO2) gate dielectrics were investigated. Post-metallization annealing (PMA) with W gate electrodes at 950 °C showed a large recovery
Autor:
Kazuo Tsutsui, Kuniyuki Kakushima, Hiroshi Iwai, Yiming Lei, Satoshi Yamakawa, Hitoshi Wakabayashi, Shingo Tomohisa, Masayuki Furuhashi
Publikováno v:
Microelectronics Reliability. 84:248-252
The effect of La-silicate interface layer (IL) on the electrical characteristics of 4H-SiC metal-oxide-semiconductor (MOS) capacitors with atomic-layer-deposited SiO2 (ALD-SiO2) gate dielectrics was investigated. In addition to a slight reduction in
Publikováno v:
Materials Science Forum. 858:829-832
High threshold voltage low loss 600 V 4H-SiC MOSFETs have been fabricated successfully using a re-oxidation technique for gate oxides and an n-type doping in the Junction Field Effect Transistor region of the MOSFET with shrunk MOS cells. The MOSFET
Publikováno v:
Materials Science Forum. :985-988
We found that threshold voltage (Vth) of a 4H-SiC MOSFET increases drastically by performing low temperature wet oxidation after nitridation in a gate oxide process. The increment of Vth depends on the wet oxidation conditions. Wet oxidation increase
Autor:
Masateru Taniguchi, Masayuki Furuhashi, Makusu Tsutsui, Tomoji Kawai, Takahito Ohshiro, Kazuki Matsubara
Publikováno v:
Journal of the American Chemical Society. 133:9124-9128
We report label-free electrical detections of chemically modified nucleobases in a DNA using a nucleotide-sized electrode gap. We found that methyl substitution contributes to increase the tunneling conductance of deoxycytidines, which was attributed
Autor:
Masayuki Furuhashi, Jun Yoshinobu
Publikováno v:
The Journal of Physical Chemistry Letters. 1:1655-1659
We investigated the chemical state and molecular orientation of 2,3,5,6-tetrafluoro-7,7,8,8-tetracyanoquinodimethane (F4-TCNQ) adsorbed on a hydrogen-terminated Si(111) (1 × 1) surface using transmission infrared (IR) spectroscopy. We deposited F4-T
Autor:
Shuhei Nakata, Munetaka Noguchi, Tadashi Nishimura, Masayuki Furuhashi, Hasegawa Junichi, Takayuki Iwasaki, Tetsuo Kodera, Mutsuko Hatano
Publikováno v:
Jpn. J. Appl. Phys.. 54
In this study, we investigate the influence of wet oxidation after nitridation of a gate oxide on the interface states in SiC metal–oxide–semiconductor field-effect transistors (MOSFETs). We used deep-level transient spectroscopy (DLTS) to clarif
Publikováno v:
The European Physical Journal Applied Physics. 27:163-166
The stability of B atom near the Si(100)/SiO 2 interface during annealing is studied by using ab initio calculation to investigate the atomic scale mechanism of B segregation at the Si(100)/SiO 2 interface. Contrary to the experimental observations s
Publikováno v:
IEICE Electronics Express. 1:126-130
The thermo dynamical stability of a boron atom at the Si/SiO2 interface was studied by using ab initio calculation to investigate a mechanism of boron pile-up at the interface during thermal annealing. The B atom is stable in bulk Si site of the inte