Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Masaya Hotta"'
Publikováno v:
Japanese Journal of Applied Physics. 57:046201
A microwave resonator probe called a curling probe (CP) was applied to in situ monitoring of a dielectric layer deposited on a chamber wall during plasma processing. The resonance frequency of the CP was analytically found to shift in proportion to t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cbd62a87b8e5f453116e1fd98eeca5ea
https://doi.org/10.7567/jjap.57.046201
https://doi.org/10.7567/jjap.57.046201
Autor:
Masaya Hotta, Dima Lubomirsky, Keiji Nakamura, Yuichi Hasegawa, Kobayashi Satoru, Soonam Park, Hideo Sugai
Publikováno v:
Japanese Journal of Applied Physics. 56:116002
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5859b5abe15e952a0cc2b59feef9eb1b
https://doi.org/10.7567/jjap.56.116002
https://doi.org/10.7567/jjap.56.116002
Publikováno v:
Plasma Sources Science and Technology. 26:045013
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa5a9db1bd656345eb87a61340dd907d
https://doi.org/10.1088/1361-6595/aa60f2
https://doi.org/10.1088/1361-6595/aa60f2
Publikováno v:
Japanese Journal of Applied Physics; Apr2018, Vol. 57 Issue 4, p1-1, 1p
Publikováno v:
Plasma Sources Science & Technology; 4/1/2017, Vol. 26 Issue 4, p1-1, 1p