Výsledky vyhledávání - "Masaya Akiyama"

Modeling of an Absolute Displacement Sensor Using a Current-Feedback-Type Driver

Autor: Shinji Wakui, Masaya Akiyama, Takashi Kai

Publikováno v: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 77:3818-3822

An absolute displacement sensor has been proposed for precise vibration control of semiconductor manufacturing equipments. Based on state feedback, a control model of the sensor is designed in order to obtain feedback gains as optimal regulator. Howe

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::4db46e8b5be7a983ad90eaef381246f6
https://doi.org/10.1299/kikaic.77.3818

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Parameter Sensitivity Analysis of Absolute Displacement Sensor and a Tuning Method of Its Dispersion(Mechanical Systems)

Autor: Masaya Akiyama, Takashi Kai, Shinji Wakui

Publikováno v: Transactions of the Japan Society of Mechanical Engineers Series C. 76:2923-2930

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f94ea445cae7f984b7ae8a9d0d96c541
https://doi.org/10.1299/kikaic.76.2923

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Development of an Absolute Displacement Sensor and Its Improvement in High Frequency Region

Autor: Takashi Kai, Masaya Akiyama, Shinji Wakui, Yukinori Nakamura

Publikováno v: 2011 Third Pacific-Asia Conference on Circuits, Communications and System (PACCS).

In the field of vibration control, detection of absolute displacement signal is being required in order to implement a sky-hook spring. Then, two kinds of absolute displacement sensors have been already proposed without utilizing integrators to avoid

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::33b440ac727baf28568852402c8f928a
https://doi.org/10.1109/paccs.2011.5990155

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Enthalpic interaction in block copolymer/homopolymer blend systems: morphological studies of solvent-cast films

Autor: Alex M. Jamieson, Masaya Akiyama

Publikováno v: Polymer. 33:3582-3592

We report morphological studies of solvent-cast polymer blend films containing a polystyrene/poly(methyl methacrylate) (PS/PMMA) block copolymer with polymers that are miscible with one block copolymer segment, viz. polystyrene (PS), random styrene/a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5db4f9f3027930b3bbd6dec29e405372
https://doi.org/10.1016/0032-3861(92)90640-i

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Pellicle-induced distortions in advanced photomasks

Autor: Roxann L. Engelstad, Hiroaki Nakagawa, Florence Eschbach, Daniel Tanzil, Fujita Minoru, Eric P. Cotte, Edward G. Lovell, Masaya Akiyama, Masahiro Kondo

Publikováno v: SPIE Proceedings.

A comprehensive design of experiment was elaborated to evaluate the effects of frame flatness, mask adhesive compliance, and mounting load on pellicle-induced distortions for soft pellicle systems. A dynamic mechanical analyzer was used to determine

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::73c4b17a55f425011bd1031a3816a843
https://doi.org/10.1117/12.476974

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