Výsledky vyhledávání - "Masatsugu Nagai"

Insight into temperature impact of Ta filaments on high-growth-rate diamond (100) films by hot-filament chemical vapor deposition

Autor: Norio Tokuda, Tsubasa Matsumoto, Takao Inokuma, Christoph E. Nebel, Yuto Nakamura, Yue Takamori, Taira Tabakoya, Masatsugu Nagai, Satoshi Yamasaki, Xufang Zhang

Publikováno v: Diamond and Related Materials. 118:108515

To improve the growth rate of diamond films, we grew single-crystalline (100) diamond films by hot-filament chemical vapor deposition (HFCVD), and investigated their growth mechanism. The methane/hydrogen concentration (CH4/H2) dependence of the grow

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::26da5057569f26d9b986ce2d61b1249b
https://doi.org/10.1016/j.diamond.2021.108515

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Mechanical damage-free surface planarization of single-crystal diamond based on carbon solid solution into nickel

Autor: Tsubasa Matsumoto, Norio Tokuda, Masatsugu Nagai, Xufang Zhang, Yuto Nakamura, Christoph E. Nebel, Kazuto Sakauchi, Taira Tabakoya, Satoshi Yamasaki, Takao Inokuma

Publikováno v: Diamond and Related Materials. 116:108390

Polishing diamond is the key process for diamond semiconductor research as well as gemology field. In this study, we proposed a novel method based on carbon solid solution into nickel (Ni) via high-temperature annealing, without mechanical damage for

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d21471280eb87bb88ea1fa1906c2a3c6
https://doi.org/10.1016/j.diamond.2021.108390

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Self-separation of freestanding diamond films using graphite interlayers precipitated from C-dissolved Ni substrates

Autor: Takao Inokuma, Norio Tokuda, Shinya Ito, Masatsugu Nagai, Tsubasa Matsumoto

Publikováno v: Journal of Crystal Growth. 470:104-107

Freestanding diamond films were fabricated by a new self-separation method. Thick poly-crystalline diamond films were grown on poly-crystalline Ni substrates by microwave plasma-enhanced chemical vapor deposition after the substrates were saturated w

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::930a6d5a1ae8804bb6c198604378b1ac
https://doi.org/10.1016/j.jcrysgro.2017.04.014

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Fabrication of graphene on atomically flat diamond (111) surfaces using nickel as a catalyst

Autor: Daisuke Takeuchi, Takao Inokuma, Tsubasa Matsumoto, Masahiko Ogura, Satoshi Yamasaki, Norio Tokuda, Shinya Ito, Shohei Kanada, Masatsugu Nagai

Publikováno v: Diamond and Related Materials. 75:105-109

We fabricated graphene on atomically flat diamond (111) surfaces via annealing with nickel as a catalyst. The annealing was conducted at 900 °C for 1 min under Ar atmosphere. Using Raman spectroscopy, the formed graphene was characterized as multila

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::847ad54c964b7a374a5a71778899e118
https://doi.org/10.1016/j.diamond.2017.02.014

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Diamond microfabrication by imprinting with nickel mold under high temperature

Autor: Christoph E. Nebel, Yusuke Nakamura, Tsubasa Matsumoto, Norio Tokuda, Taira Tabakoya, Satoshi Yamasaki, Masatsugu Nagai, Daisuke Takeuchi, Yoshiaki Kato, K. Kobayashi, Haruhisa Kato, Takao Inokuma, Mutsuo Ogura, Kazuto Sakauchi, Xufang Zhang, Toshiharu Makino

Publikováno v: Diamond and Related Materials. 114:108294

Diamond is a key material for quantum devices and sensors, microelectromechanical systems, and the next-generation electronic devices. Microfabrication technology of single-crystal diamond (SCD) for device fabrication and processing is required but h

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3a80c41ecdbecd5c050c669f3d39566a
https://doi.org/10.1016/j.diamond.2021.108294

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Formation of U-shaped diamond trenches with vertical {111} sidewalls by anisotropic etching of diamond (110) surfaces

Autor: T. Tabakoya, Tsubasa Matsumoto, Christoph E. Nebel, Yusuke Nakamura, Toshiharu Makino, Norio Tokuda, Masatsugu Nagai, Takao Inokuma, Tatsuki Yamada, Satoshi Yamasaki

Publikováno v: Diamond and Related Materials. 103:107713

U-shaped diamond trenches with vertical {111} sidewalls for power devices were successfully obtained by anisotropic etching of diamond (110) surfaces using Ni films in high-temperature (1000 °C) water vapor. The etching rate for the diamond (110) su

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8b0718753355aef47d1788d1c59205ad
https://doi.org/10.1016/j.diamond.2020.107713

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Anisotropic diamond etching through thermochemical reaction between Ni and diamond in high-temperature water vapour

Autor: Takao Inokuma, Tsubasa Matsumoto, Masatsugu Nagai, Kazuhiro Nakanishi, Norio Tokuda, Toshiharu Makino, Hiromitsu Kato, Satoshi Yamasaki, Hiraku Takahashi

Publikováno v: Scientific Reports
Scientific Reports, Vol 8, Iss 1, Pp 1-8 (2018)

Diamond possesses excellent physical and electronic properties, and thus various applications that use diamond are under development. Additionally, the control of diamond geometry by etching technique is essential for such applications. However, conv

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c281a4273c032ef7a98011d302801bb7
http://europepmc.org/articles/PMC5923242

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